Design of flexure-based modular architecture micro-positioning stage
Sign Up to like & getrecommendations! Published in 2020 at "Microsystem Technologies"
DOI: 10.1007/s00542-020-04830-9
Abstract: As the current trend in numerous industrial domains is to miniaturise products, micro-positioning stage(MPS) capable of performing micro-manipulation and micro-assembly tasks with sub-micrometer or nanometer precision is playing an increasing important role in these fields.… read more here.
Keywords: micro positioning; micro; flexure based; positioning stage ... See more keywords
A novel inverse modeling control for piezo positioning stage
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Mechanical Science and Technology"
DOI: 10.1007/s12206-018-1136-2
Abstract: This paper focuses on the application of a novel inverse nonlinear autoregressive with exogenous input (NARX) structure and a fuzzy inference system on position control of a piezo positioning stage (PPS) system. The highly relationship… read more here.
Keywords: positioning stage; novel inverse; control; inverse modeling ... See more keywords
Modular kinematics and statics modeling for precision positioning stage
Sign Up to like & getrecommendations! Published in 2017 at "Mechanism and Machine Theory"
DOI: 10.1016/j.mechmachtheory.2016.10.009
Abstract: Abstract Compliant amplifying mechanisms and guiding mechanisms are prevalently adopted in most present piezo-actuated precision positioning stages. By considering the coupled relations among piezoelectric actuator, compliant amplifying mechanism and guiding mechanism, an analytical method towards… read more here.
Keywords: statics modeling; positioning stage; precision positioning; kinematics ... See more keywords
Optimization of a 2-DOF micro-positioning stage using corrugated flexure units
Sign Up to like & getrecommendations! Published in 2018 at "Mechanism and Machine Theory"
DOI: 10.1016/j.mechmachtheory.2017.11.021
Abstract: Abstract This paper presents an analytical model that can be utilized in the design and optimization of a 2-DOF micro-positioning stage using corrugated flexure (CF) units. Stiffness components of the CF beam and the middle… read more here.
Keywords: dof micro; stage using; micro positioning; positioning stage ... See more keywords
Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage
Sign Up to like & getrecommendations! Published in 2018 at "Robotics and Computer-Integrated Manufacturing"
DOI: 10.1016/j.rcim.2017.11.006
Abstract: Abstract Limited travel stroke constrains the application of existing XYZ parallel micro/nano-positioning stages. In this paper, a novel parallel-kinematic symmetrical micro/nano-positioning stage is proposed to enlarge the travel range with a compact physical size. For… read more here.
Keywords: parallel micro; positioning stage; micro nano; stage ... See more keywords
Realtime in-plane displacements tracking of the precision positioning stage based on computer micro-vision
Sign Up to like & getrecommendations! Published in 2019 at "Mechanical Systems and Signal Processing"
DOI: 10.1016/j.ymssp.2019.01.046
Abstract: Abstract This study presents a micro-vision-based measurement method for realtime and high accuracy in-plane displacements tracking of the precision positioning stage. In this method, to realize high magnification ratio and high video rate imaging of… read more here.
Keywords: micro vision; precision positioning; stage; positioning stage ... See more keywords
Adaptive Estimated Inverse Output-Feedback Quantized Control for Piezoelectric Positioning Stage
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Transactions on Cybernetics"
DOI: 10.1109/tcyb.2018.2826519
Abstract: Focusing on the piezoelectric positioning stage, this paper proposes an adaptive estimated inverse output-feedback quantized control scheme. First, the quantized issue due to the use of computer is addressed by introducing a linear time-varying quantizer… read more here.
Keywords: piezoelectric positioning; estimated inverse; quantized control; positioning stage ... See more keywords
Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages
Sign Up to like & getrecommendations! Published in 2018 at "Actuators"
DOI: 10.3390/act7010005
Abstract: Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades.… read more here.
Keywords: positioning stage; nano positioning; micro nano; compliant micro ... See more keywords
Hysteresis Characteristics and MPI Compensation of Two-Dimensional Piezoelectric Positioning Stage
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13020321
Abstract: Piezoelectric positioning stage is the core component of precision positioning system and advanced instrument. Its hysteresis characteristics, especially rate-dependent characteristics, are the main factors affecting the positioning or control accuracy. The multi-slope Prandtl–Ishlinskii (MPI) based… read more here.
Keywords: positioning stage; hysteresis; compensation; piezoelectric positioning ... See more keywords
Motion and Load Analysis of the Flexible Platform Based on Noncontact Processing
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13070988
Abstract: In this paper, we explore the applicability of the positioning stage based on flexible hinges for noncontact processing. According to the actual application of the positioning stage, Hooke’s law, the Euler–Bernoulli beam theory, and the… read more here.
Keywords: positioning stage; platform; noncontact processing; analysis ... See more keywords
Dynamic Modeling and Attitude Decoupling Control for a 3-DOF Flexible Piezoelectric Nano-Positioning Stage Based on ADRC
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101591
Abstract: The paper proposes a three-degrees-of-freedom flexible nano-positioning stage constructed from compliant flexures and piezoelectric thin-sheet actuators, featuring a compact size and fast dynamic responses, which can be extensively applied to the typical micro/nano-positioning applications. Meanwhile,… read more here.
Keywords: positioning stage; nano; nano positioning; attitude decoupling ... See more keywords