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Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.05.012
Abstract: Abstract Density Functional Theory (DFT) calculations demonstrate that holes can trap in crystalline and amorphous HfO2 and Al2O3 in both single- and bipolaron states. Polarons in the crystalline phase have small trapping energies of the…
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Keywords:
amorphous hfo2;
hole trapping;
positive charging;
hfo2 al2o3 ... See more keywords