Facts and Myths of Dielectric Breakdown Processes—Part II: Post-Breakdown and Variability
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DOI: 10.1109/ted.2019.2933615
Abstract: Device dimension scaling and process complexity have revealed new phenomena such as post-breakdown (BD) and variability issues in advanced technology nodes. Coupling of the first BD phenomena and their methodologies discussed in part I with… read more here.
Keywords: post breakdown; part; breakdown; variability ... See more keywords