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Post-FIB Specimen Preparation of Atom Probe Specimens under Controlled Environments for Correlative Microscopy

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0 Published in 2019 at "Microscopy and Microanalysis"

DOI: 10.1017/s1431927619013503

Abstract: Atom probe tomography (APT) is a powerful characterization technique for obtaining three-dimensional structure and materials composition at the atomic scale. Typically, transmission electron microscopy (TEM) and APT techniques are combined for a complete characterization of… read more here.

Keywords: preparation; microscopy; post fib; atom probe ... See more keywords