Post-trench restoration for vertical GaN power devices
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DOI: 10.1063/5.0191454
Abstract: The impact of the post-trench restoration on the electrical characteristics of vertical GaN power devices is systematically investigated in this work. Following the achievement of microtrench-free GaN trench structure with modified dry etching conditions, the… read more here.
Keywords: post trench; vertical gan; gan power; trench restoration ... See more keywords