Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency
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DOI: 10.1109/access.2022.3178990
Abstract: A new method is proposed to increase the resonant frequency of a Capacitive Micromachined Ultrasonic Transducer (CMUT) device while keeping the radii unchanged for devices fabricated by sacrificial release (SR) method. The resonant frequency of… read more here.
Keywords: post width; frequency; supporting post; resonant frequency ... See more keywords