Confocal Sputtered ZnO Thin Films: The Role of RF Sputtering Power and Annealing in Enhancing Structural and Optoelectronic Properties
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DOI: 10.1149/2162-8777/adcc55
Abstract: This research investigates the deposition of ZnO thin films on glass substrates at ambient temperature using radio-frequency (RF) magnetron sputtering, with RF power levels between 50 and 300 W. The films were subsequently annealed in… read more here.
Keywords: thin films; sputtering power; power annealing; zno thin ... See more keywords