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Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-3922-2
Abstract: This paper presents the development of a process enabling to fabricate complex three-dimensional nickel microdevices. The possibilities offered by this new process are highlighted by the fabrication of an original electrostatic MEMS energy harvester designed…
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Keywords:
energy;
power leadless;
fabrication;
process ... See more keywords