Tailoring of titanium thin film properties in high power pulsed magnetron sputtering
Sign Up to like & getrecommendations! Published in 2018 at "Vacuum"
DOI: 10.1016/j.vacuum.2018.01.039
Abstract: Abstract Ti films are widely used in electrical engineering, biomedical instrumentation, and other industries owing to their excellent material properties. High Power Pulsed Magnetron Sputtering (HPPMS) is a promising physical vapor deposition (PVD) technique used… read more here.
Keywords: magnetron sputtering; high power; properties high; power ... See more keywords