Effect of Nitridation and Pre-Growth Annealing of the Sapphire Substrate on the Quality of Zinc Oxide Thin Films Grown by RF-Magnetron Sputtering
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DOI: 10.12693/aphyspola.131.1325
Abstract: ZnO has attracted much attention due to its wide bandgap (3.2 eV) and high exciton binding energy of 60 meV. These properties make ZnO a highly desirable material for high frequency devices that can work… read more here.
Keywords: sapphire substrate; thin films; sapphire; pre growth ... See more keywords