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Published in 2020 at "Solid-state Electronics"
DOI: 10.1016/j.sse.2019.107675
Abstract: Abstract PZT piezoelectric thin film based technology is promising in the field of micro-actuators. This paper discusses the effects of pre-polarization on the key properties of PZT thin film, and explores the improvement rules of…
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Keywords:
pzt thin;
polarization;
thin film;
film based ... See more keywords