Adjustable response of PZT thin film based piezoelectric micro-actuator through DC bias pre-polarization
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DOI: 10.1016/j.sse.2019.107675
Abstract: Abstract PZT piezoelectric thin film based technology is promising in the field of micro-actuators. This paper discusses the effects of pre-polarization on the key properties of PZT thin film, and explores the improvement rules of… read more here.
Keywords: pzt thin; polarization; thin film; film based ... See more keywords