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Published in 2019 at "Optoelectronics, Instrumentation and Data Processing"
DOI: 10.3103/s8756699019030130
Abstract: A method has been developed and investigated to measure the fabrication accuracy of precision synthesized structures by circular laser writing systems using special microstructures formed in two orthogonal directions. These microstructures consist of two parts,…
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Keywords:
laser writing;
fabrication;
precision synthesized;
circular laser ... See more keywords