Depth resolution and preferential sputtering in depth profiling of sharp interfaces
Sign Up to like & getrecommendations! Published in 2017 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2017.03.110
Abstract: Abstract The influence of preferential sputtering on depth resolution of sputter depth profiles is studied for different sputtering rates of the two components at an A/B interface. Surface concentration and intensity depth profiles on both… read more here.
Keywords: depth; sputtering depth; depth resolution; preferential sputtering ... See more keywords
Prediction and experimental determination of the layer thickness in SIMS depth profiling of Ge/Si multilayers: Effect of preferential sputtering and atomic mixing
Sign Up to like & getrecommendations! Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.03.223
Abstract: Abstract A comparison is performed between the experimentally determined variation of the layer thickness at 50 at% with the primary ion energy and the prediction of this variation and of the layer thickness at 50% amplitude… read more here.
Keywords: layer thickness; sims depth; preferential sputtering; thickness ... See more keywords
Segregation and preferential sputtering of Cr in WCrY smart alloy
Sign Up to like & getrecommendations! Published in 2020 at "Nuclear Materials and Energy"
DOI: 10.1016/j.nme.2020.100736
Abstract: The temperature driven segregation of Cr to the surface of the tungsten-based WCrY alloy is analysed with low energy ion scattering of He+ ions with an energy of 1 keV in the temperature range from… read more here.
Keywords: energy; segregation; surface; temperature ... See more keywords