High quality aluminum nitride layer grown with a combined step of nitridation and trimethylaluminum preflow
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DOI: 10.1016/j.tsf.2021.138915
Abstract: ABSTRACT In this work, aluminum nitride (AlN) layers were grown on sapphire substrate with different times and temperatures of nitridation through metal organics chemical vapor deposition growth technique. Besides, during the growth process, trimethylaluminum (TMAl)… read more here.
Keywords: aluminum nitride; nitridation; layer; high quality ... See more keywords