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Published in 2019 at "Inorganic Materials"
DOI: 10.1134/s0020168519010175
Abstract: Abstract —We have studied the interaction of etchants and etchant mixtures with {100} planes of InP substrates. The results demonstrate that mesa stripes and grooves faceted by a combination of planes differing in polarity—{111}A, {111}B,…
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Keywords:
indium phosphide;
surfaces edge;
preparation shaped;
edge emitting ... See more keywords