Influence of deposition pressure and power on characteristics of RF-Sputtered Mo films and investigation of sodium diffusion in the films
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DOI: 10.1016/j.cap.2018.02.014
Abstract: Abstract Mo films deposited by DC sputtering are widely used as back contact in CIGS and CZTS based thin film solar cells. However, there have been only a few studies on the deposition of Mo… read more here.
Keywords: pressure power; deposition pressure; power; sputtered films ... See more keywords