Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures
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DOI: 10.1109/jmems.2021.3083935
Abstract: This paper presents a zeroth and first order perturbative analysis of prestressed electrostatic actuated Microelectromechanical systems (MEMS). Perturbation theory is used to calculate the deflection profile of various MEMS structures, from which the pull-in voltage… read more here.
Keywords: prestressed electrostatic; deflection; voltage; pull voltage ... See more keywords