Physics-Prior Bayesian Neural Networks in Semiconductor Processing
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DOI: 10.1109/access.2019.2940130
Abstract: With the fast scaling-down and evolution of integrated circuit (IC) manufacturing technology, the fabrication process becomes highly complex, and the experimental cost of the processes is significantly elevated. Therefore, in many cases, it is very… read more here.
Keywords: prior bayesian; physics prior; semiconductor; physics ... See more keywords