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Published in 2021 at "International Journal of Precision Engineering and Manufacturing"
DOI: 10.1007/s12541-021-00561-7
Abstract: The article presents a redesigned sensor holder for an atomic force microscope (AFM) with an adjustable probe direction, which is integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in…
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Keywords:
holder;
probe direction;
sensor holder;
metrology ... See more keywords