Monolayer Semiconductors: Scanning Probe Lithography Patterning of Monolayer Semiconductors and Application in Quantifying Edge Recombination (Adv. Mater. 48/2019)
Sign Up to like & getrecommendations! Published in 2019 at "Advanced Materials"
DOI: 10.1002/adma.201970340
Abstract: Author(s): Zhao, Peida; Wang, Ruixuan; Lien, Der‐Hsien; Zhao, Yingbo; Kim, Hyungjin; Cho, Joy; Ahn, Geun Ho; Javey, Ali read more here.
Keywords: scanning probe; monolayer; semiconductors scanning; lithography patterning ... See more keywords
Sub-10 nm patterning of few-layer MoS2 and MoSe2 nanolectronic devices by oxidation scanning probe lithography
Sign Up to like & getrecommendations! Published in 2021 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2020.148231
Abstract: Abstract The properties of 2D materials devices are very sensitive to the physical, chemical and structural interactions that might happen during processing. Low-invasive patterning methods are required to fabricate devices at the nanoscale. Here we… read more here.
Keywords: mos2 mose2; scanning probe; oxidation scanning; layer ... See more keywords
High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.04.006
Abstract: Thermal scanning probe lithography is an emerging nanofabrication technique for rapid prototyping of arbitrary topographies in thermally sensitive resist. This feature, paired to the recent advances in dry plasma etching techniques, allows the fabrication of… read more here.
Keywords: aspect ratio; scanning probe; thermal scanning; high aspect ... See more keywords
Phase masks for electron microscopy fabricated by thermal scanning probe lithography.
Sign Up to like & getrecommendations! Published in 2019 at "Micron"
DOI: 10.1016/j.micron.2019.102753
Abstract: Nano-structured phase masks offer intriguing possibilities in electron-beam shaping. The fabrication of such phase masks is typically achieved by focused (Ga+-)ion beam milling of thin membranes. To overcome the problem of Ga implantation in the… read more here.
Keywords: phase; scanning probe; phase masks; microscopy ... See more keywords
Fabrication of a VO2-Based Tunable Metasurface by Electric-Field Scanning Probe Lithography with Precise Depth Control.
Sign Up to like & getrecommendations! Published in 2023 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c21935
Abstract: Vanadium dioxide (VO2) is widely employed in developing tunable optoelectronic devices due to its significant changes in optical and electric properties upon phase transition. To fabricate the VO2-based functional devices down to the micro/nanoscale, a… read more here.
Keywords: electric field; vo2 based; scanning probe; probe lithography ... See more keywords
Aluminum Hydroxide Nano- and Microstructures Fabricated Using Scanning Probe Lithography with KOH Ink
Sign Up to like & getrecommendations! Published in 2023 at "ACS Omega"
DOI: 10.1021/acsomega.3c00038
Abstract: Using scanning probe lithography (SPL) with KOH ink, this study fabricates aluminum hydroxide (Al(OH)3) nano- and microfeatures on a gold (Au) film that has been deposited on an aluminum (Al) layer. Hydroxyl ions (OH–) from… read more here.
Keywords: using scanning; ink; scanning probe; probe lithography ... See more keywords
Nanopatterning of GeTe phase change films via heated-probe lithography.
Sign Up to like & getrecommendations! Published in 2017 at "Nanoscale"
DOI: 10.1039/c7nr01482a
Abstract: The crystallization of amorphous germanium telluride (GeTe) thin films is controlled with nanoscale resolution using the heat from a thermal AFM probe. The dramatic differences between the amorphous and crystalline GeTe phases yield embedded nanoscale… read more here.
Keywords: phase change; probe; nanopatterning gete; gete phase ... See more keywords
Parallelized biocatalytic scanning probe lithography for the additive fabrication of conjugated polymer structures.
Sign Up to like & getrecommendations! Published in 2018 at "Nanoscale"
DOI: 10.1039/c8nr01283k
Abstract: Scanning probe lithography (SPL) offers a more accessible alternative to conventional photolithography as a route to surface nanofabrication. In principle, the synthetic scope of SPL could be greatly enhanced by combining the precision of scanning… read more here.
Keywords: scanning probe; fabrication; parallelized biocatalytic; lithography ... See more keywords
Mechanical scanning probe lithography of perovskites for fabrication of high-Q planar polaritonic cavities
Sign Up to like & getrecommendations! Published in 2023 at "Applied Physics Letters"
DOI: 10.1063/5.0142570
Abstract: Exciton–polaritons are unique quasiparticles with hybrid properties of an exciton and a photon, opening ways to realize ultrafast strongly nonlinear systems and inversion-free lasers based on Bose–Einstein polariton condensation. However, the real-world applications of polariton… read more here.
Keywords: lithography; scanning probe; probe lithography; planar ... See more keywords
Scanning Probe Lithography: State-of-the-Art and Future Perspectives
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13020228
Abstract: High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography… read more here.
Keywords: scanning probe; nanofabrication; probe lithography; state art ... See more keywords
Subwavelength Nanostructuring of Gold Films by Apertureless Scanning Probe Lithography Assisted by a Femtosecond Fiber Laser Oscillator
Sign Up to like & getrecommendations! Published in 2018 at "Nanomaterials"
DOI: 10.3390/nano8070536
Abstract: Optical methods in nanolithography have been traditionally limited by Abbe’s diffraction limit. One method able to overcome this barrier is apertureless scanning probe lithography assisted by laser. This technique has demonstrated surface nanostructuring below the… read more here.
Keywords: apertureless scanning; laser; probe lithography; scanning probe ... See more keywords