Coupled mechanism and pull-in instability of several probe-membrane assemblies subjected to electrostatic force
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DOI: 10.1080/15376494.2016.1255825
Abstract: ABSTRACT The mathematical model of a coupled probe-membrane system subjected to electrostatic force is constructed. It is different than the conventional nano/micro actuator, which is constructed by two independent fixed/mobile conducting electrodes. The formula of… read more here.
Keywords: electrostatic force; pull instability; probe membrane; subjected electrostatic ... See more keywords