Expanding Plasma Process for Nitriding Mo–Ti Bilayer Thin Films
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DOI: 10.3390/coatings9020096
Abstract: Owing to the reducing effect of NHx radicals and H species produced in (Ar-N2-H2) expanding plasma, chemical reactions are promoted in thin metal films in contrast with other plasma treatments where the impinging energetic ions… read more here.
Keywords: bilayer; nitriding bilayer; plasma process; process nitriding ... See more keywords