Analysis and modeling of wafer-level process variability in 28 nm FD-SOI using split C-V measurements
Sign Up to like & getrecommendations! Published in 2018 at "Solid-state Electronics"
DOI: 10.1016/j.sse.2018.04.001
Abstract: Abstract This work details the analysis of wafer level global process variability in 28 nm FD-SOI using split C-V measurements. The proposed approach initially evaluates the native on wafer process variability using efficient extraction methods on… read more here.
Keywords: wafer level; variability soi; variability; process ... See more keywords
An adaptive thresholding-based process variability monitoring
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Quality Technology"
DOI: 10.1080/00224065.2019.1569952
Abstract: Abstract In high-dimensional processes, monitoring process variability is considerably difficult due to the large number of variables and the limited number of samples. Monitoring changes in the covariance matrix of a multivariate process is often… read more here.
Keywords: chart; process variability; process; shift patterns ... See more keywords