Process Window for Nd:YAG Laser Welding of Super Duplex Stainless Steel
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Russian Laser Research"
DOI: 10.1007/s10946-018-9754-9
Abstract: Super duplex stainless steel (SDSS), an advanced duplex stainless steel with higher alloying concentration, is employed widely in acidic atmospheres. In this study, we make an attempt to develop a process window for the pulsed… read more here.
Keywords: stainless steel; process; process window; duplex stainless ... See more keywords
Initiative global NILS control in source and mask optimization for process window enhancement.
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DOI: 10.1364/ao.482501
Abstract: Semiconductor processing is becoming more challenging as integrated circuit dimensions shrink. An increasing number of technologies are being developed for the purpose of ensuring pattern fidelity, and source and mask optimization (SMO) method has outstanding… read more here.
Keywords: mask optimization; source mask; mask; process window ... See more keywords
Source and mask optimizing with a defocus antagonism for process window enhancement.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.469275
Abstract: With the continuous reduction of critical dimension (CD) of integrated circuits, inverse lithography technology (ILT) is widely adopted for the resolution enhancement to ensure the fidelity of photolithography, and for the process window (PW) improvement… read more here.
Keywords: process window; process; source mask; dof ... See more keywords