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Published in 2017 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2017.2679714
Abstract: A semiconductor wafer undergoes various processing steps before it is transformed from a plain silicon wafer to one populated with thousands of integrated circuits. Each of these processing steps is susceptible to specific types of…
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Keywords:
defect signatures;
semiconductor;
approach associating;
processing steps ... See more keywords