Articles with "process zones" as a keyword



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An Effective Approach for Associating the Sources of Defect Signatures to Process Zones

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Published in 2017 at "IEEE Transactions on Semiconductor Manufacturing"

DOI: 10.1109/tsm.2017.2679714

Abstract: A semiconductor wafer undergoes various processing steps before it is transformed from a plain silicon wafer to one populated with thousands of integrated circuits. Each of these processing steps is susceptible to specific types of… read more here.

Keywords: defect signatures; semiconductor; approach associating; processing steps ... See more keywords