Laser processing of thin-film multilayer structures: comparison between a 3D thermal model and experimental results
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DOI: 10.3762/bjnano.8.176
Abstract: In this research, a numerical model is introduced for simulation of laser processing of thin film multilayer structures, to predict the temperature and ablated area for a set of laser parameters including average power and… read more here.
Keywords: processing thin; thin film; film multilayer; film ... See more keywords