A method for wafer assignment in semiconductor wafer fabrication considering both quality and productivity perspectives
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DOI: 10.1016/j.jmsy.2019.05.006
Abstract: Abstract In the semiconductor wafer fabrication process, wafers go through a series of sequential process steps. Typically, each process step has several machines, and the wafers are assigned to one whenever they enter the process… read more here.
Keywords: productivity perspectives; semiconductor; wafer fabrication; productivity ... See more keywords