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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101731
Abstract: The profile and concentricity of hemispherical shells affect the frequency split and quality factor of hemispherical resonators. To compensate for machining errors caused by tool wear and tool setting, an on-machine measurement (OMM) method for…
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Keywords:
machine;
profile concentricity;
hemispherical shells;
ultra precision ... See more keywords