Sidewall profile reconstruction of microstructures with high aspect ratio based on near-infrared light scanning interferometry
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DOI: 10.1063/1.5049494
Abstract: Sidewall profile reconstruction of microstructures with the high aspect ratio is a problem urgently to be solved in MEMS field. In this paper, a measuring method based on near-infrared light scanning interferometry (NILSI) is presented… read more here.
Keywords: near infrared; infrared light; profile reconstruction; sidewall profile ... See more keywords