3D profiling of rough silicon carbide surfaces by coherence scanning interferometry using a femtosecond laser.
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DOI: 10.1364/ao.57.002584
Abstract: We test an erbium-doped fiber femtosecond laser for its potential as a light source for a coherence scanning interferometer for large field-of-view profiling of rough silicon carbide (SiC) surfaces. This infrared fiber pulse laser is… read more here.
Keywords: rough silicon; coherence; femtosecond laser; profiling rough ... See more keywords