Area scanning method for 3D surface profilometry based on an adaptive confocal microscope
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DOI: 10.1016/j.optlaseng.2019.105819
Abstract: Abstract Conventional confocal 3D microscopes suffer from a slow measurement speed due to its requirement of scanning in three directions. Although lateral slit scanning has been proven to perform similarly to single point scanning, a… read more here.
Keywords: area; profilometry based; surface profilometry; microscope ... See more keywords