An evaluation of optical profilometry techniques for CMUT characterization
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DOI: 10.1007/s00542-019-04377-4
Abstract: Accurate characterization of thin films and geometric features including the cavities during and after the fabrication process is crucial for proper CMUT operation, reliability, consistent array operation, and improved yield. Three different optical profilometry techniques:… read more here.
Keywords: characterization; microscopy; profilometry techniques; optical profilometry ... See more keywords