Effect and Regulation Mechanism of Post-deposition Annealing on the Ferroelectric Properties of AlScN Thin Films.
Sign Up to like & getrecommendations! Published in 2024 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.3c17282
Abstract: Integrating ferroelectric AlScN with III-N semiconductors to enhance the performance and tunability of nitride devices requires high-quality AlScN films. This work focuses on the effect and regulation mechanism of post-annealing in pure N2 on the… read more here.
Keywords: ferroelectric properties; effect regulation; properties alscn; alscn films ... See more keywords
Effect of Sc spatial distribution on the electronic and ferroelectric properties of AlScN.
Sign Up to like & getrecommendations! Published in 2024 at "Materials horizons"
DOI: 10.1039/d4mh00551a
Abstract: While aluminum scandium nitride based ferroelectric materials have shown significant promise for non-volatile memory applications, difficulties relating challenges in device performance, such as electrical leakage, to structural characteristics motivate improved understanding of the fundamental structure-property… read more here.
Keywords: effect; ferroelectric properties; properties alscn; spatial distribution ... See more keywords