Compositional effects on the electrical properties of extremely disordered molybdenum oxynitrides thin films
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DOI: 10.1016/j.matchemphys.2019.122075
Abstract: Abstract Molybdenum oxynitride (MoNxOy) thin films were grown by reactive sputtering on Si (100) substrates at room temperature. The partial pressure of Ar was fixed at 90 %, and the remaining 10 % was adjusted… read more here.
Keywords: thin films; properties extremely; compositional effects; effects electrical ... See more keywords