Structural and optical properties of facet-controlled MOVPE grown c-GaN on β-Ga2O3 (100) substrates
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DOI: 10.1088/1361-6641/add6ce
Abstract: This study reports the structural and optical characterisation of GaN layers grown on β-Ga2O3 substrates using a three-step facet-controlled MOVPE growth process. Surface morphology was analyzed using AFM and SEM, while high-resolution XRD provided insights… read more here.
Keywords: controlled movpe; structural optical; properties facet; facet controlled ... See more keywords