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Published in 2024 at "Applied Sciences"
DOI: 10.3390/app14031121
Abstract: MEMS (micro-electro-mechanical system) gyroscopes and accelerometers are used in several applications. They are very popular due to their small size, low price, and accessibility. The design of MEMS accelerometers enables the measurement of vibrations, with…
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Keywords:
properties mems;
analysis;
stochastic properties;
analysis stochastic ... See more keywords