Processing, structure and properties of reactively sputtered films of titanium dioxide and suboxides
Sign Up to like & getrecommendations! Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.06.001
Abstract: Abstract A series of TiOx(0 O) solid solution, TiO, Ti2O3, Magneli phases, rutile and anatase TiO2. With increasing the temperature, the crystallinity, and oxygen content of the films varied, which resulted in changes in film… read more here.
Keywords: films titanium; processing structure; properties reactively; sputtered films ... See more keywords