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Published in 2020 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2020.105163
Abstract: Abstract Passivation of n-type and p-type monocrystalline CZ Si wafers (both polished and textured) with silicon oxide layers prepared by thermal (TO), chemical (CO) and plasma (PO) techniques have been extensively investigated from the measurement…
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Keywords:
passivation;
study;
layers prepared;
study properties ... See more keywords
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1
Published in 2020 at "Nanomaterials"
DOI: 10.3390/nano10071415
Abstract: In the present work, non-stoichiometric silicon oxide films (SiOx) deposited using a hot filament chemical vapor deposition technique at short time and simple parameters of depositions are reported. This is motivated by the numerous potential…
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Keywords:
spectroscopic properties;
siox films;
using hfcvd;
films using ... See more keywords