Formation and Properties of Thermistor Chips Based on Semiconductor 3D Metal Oxide Films Obtained by RF-Magnetron Sputtering
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DOI: 10.3390/ijms24010742
Abstract: The formation of oxide semiconductor films of the (Mn,Co,Cu)3O4 type by radio frequency magnetron sputtering is presented. The conditions of deposition and subsequent heat treatment make it possible to obtain films with electrophysical characteristics close… read more here.
Keywords: semiconductor; geometry; formation properties; magnetron sputtering ... See more keywords