Articles with "protection oxidation" as a keyword



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Protection of Cu from Oxidation by Ta Capping Layer

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Published in 2023 at "Coatings"

DOI: 10.3390/coatings13050926

Abstract: X-ray reflectometry (XRR) and X-ray photoelectron spectroscopy (XPS) measurements (core levels and valence bands) were made of Cu thin films that were prepared and coated by capping Ta layers with different thicknesses (5, 10, 15,… read more here.

Keywords: oxidation; protection oxidation; layer; oxidation capping ... See more keywords