Protective amorphous carbon coatings on glass substrates
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DOI: 10.1063/1.5002091
Abstract: Thick amorphous carbon films were deposited by the Magnets-in-Motion (M-M) rf linear hollow cathode at varying acetylene contents in Ar in a hybrid PVD/PE-CVD process directly on glass substrates. The hollow cathode plates manufactured from… read more here.
Keywords: carbon coatings; amorphous carbon; protective amorphous; glass substrates ... See more keywords