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Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4046-4
Abstract: In the present work, we propose an analytical model for the static and DC dynamic pull-in analysis of electrostatically actuated, initially curled microcantilever beams. The analytical model of the initially deformed microcantilever beam incorporates the…
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Keywords:
pull;
pull analysis;
dynamic pull;
static dynamic ... See more keywords