Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma
Sign Up to like & getrecommendations! Published in 2019 at "Physics of Plasmas"
DOI: 10.1063/1.5085482
Abstract: As the wafer size increases, pulsed dual frequency inductively coupled plasma sources have been proposed as an effective method to achieve large-area uniform plasmas. A two-dimensional (2D) self-consistent fluid model, combined with an electromagnetic module,… read more here.
Keywords: duty; pulse duty; duty cycle; uniformity ... See more keywords
Enhanced performance of electrodeposited Ni-SiC plating as an alternative to electroplated chromium deposits: the effect of pulse duty cycle
Sign Up to like & getrecommendations! Published in 2022 at "Surface Topography: Metrology and Properties"
DOI: 10.1088/2051-672x/ac5503
Abstract: Ni-SiC composite coating was prepared by the electrodeposition under the pulse current as an alternative for the environment polluted and human cancerogenic hard chromium plating. The microstructure and tribological performance of the composite coating under… read more here.
Keywords: duty; performance; duty cycle; composite coating ... See more keywords