Power matching to pulsed inductively coupled plasmas
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DOI: 10.1063/5.0002522
Abstract: Matching of power delivery to nonlinear loads in plasma processing is a continuing challenge. Plasma reactors used in microelectronics fabrication are increasingly multi-frequency and/or pulsed, producing a non-linear and, in many cases, non-steady state electrical… read more here.
Keywords: plasma; coupled plasmas; power; pulsed inductively ... See more keywords
Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/1.4967913
Abstract: The time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas have been investigated in this paper, by means of a Langmuir probe and a global model. The plasma properties, e.g., the electron density, effective electron temperature,… read more here.
Keywords: time; resolved characteristics; characteristics pulsed; time resolved ... See more keywords