Nanocrystalline diamond film grown by pulsed linear antenna microwave CVD
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DOI: 10.1016/j.diamond.2021.108576
Abstract: Abstract The growth of large area nanocrystalline diamond (NCD) films is of industrial interests because of their applications as tribological coatings and micromechanical actuators. To reduce thermal payloads, pulsed linear antenna plasma deposition (LAPD) has… read more here.
Keywords: diamond; nanocrystalline diamond; pulsed linear; film ... See more keywords