The influence of pulsed negative bias on the properties of silicon oxide barrier coatings prepared by microwave PECVD technology
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DOI: 10.1088/1361-6463/addbea
Abstract: In this paper, the plasma-enhanced chemical vapor deposition (PECVD) technique was used to prepare the barrier silicon oxide (SiOx) films. The influence of applying a pulsed negative bias voltage on the deposition substrate on the… read more here.
Keywords: deposition; silicon oxide; barrier; pulsed negative ... See more keywords
STUDY OF THE PULSED NEGATIVE CORONA IN OXYGEN IN AN ELECTRODE SYSTEM WITH A MOVING CATHODE
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DOI: 10.46813/2025-155-093
Abstract: A study of the pulsed negative corona in oxygen at the combined power supply in the electrode system with a moving cathode, its electrodynamic characteristics, and the amount of synthesized ozone, depending on the cathode… read more here.
Keywords: cathode; corona oxygen; study pulsed; pulsed negative ... See more keywords