Nanofabrication of all-dielectric metasurfaces through pulsed thermal scanning probe lithography
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DOI: 10.1038/s41598-025-07428-1
Abstract: Many fields in science and industry rely on the advances of nanofabrication processes. However, well-established techniques, such as electron beam lithography, might pose restrictions on dielectric materials due to surface charging effects. We propose using… read more here.
Keywords: scanning probe; lithography; pulsed thermal; probe lithography ... See more keywords