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Published in 2020 at "Optics express"
DOI: 10.1364/oe.404568
Abstract: The rapid development of optoelectronic components has demanded high-speed drilling for alumina ceramic substrate. However, the existing drilling speed cannot meet the demand due to the limitation of conventional laser system and drilling method. In…
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Keywords:
laser;
sub microsecond;
pulsed thin;
speed ... See more keywords