Precision 3D profile in-line measurement of through-silicon via (TSV) based on high-frequency spectrum signals in the pupil plane
Sign Up to like & getrecommendations! Published in 2018 at "Optics Communications"
DOI: 10.1016/j.optcom.2018.04.033
Abstract: Abstract As a deep and fine vertical via, through-silicon via (TSV) is a key factor in three-dimensional (3D) integrated circuit stack, which can pass through a silicon wafer or chip for 3D integration. TSV’s 3D… read more here.
Keywords: high frequency; pupil plane; tsv; silicon ... See more keywords
Projected Pupil Plane Pattern:an alternative LGS wavefront sensing technique
Sign Up to like & getrecommendations! Published in 2018 at "Monthly Notices of the Royal Astronomical Society"
DOI: 10.1093/mnras/sty926
Abstract: For the next generation of extremely large telescopes, Focal Anisoplanatism (FA) renders single Laser Guide Star AO useless. Here we analyze a novel LGS alternative configuration with corresponding wavefront sensing and reconstruction method, termed Projected… read more here.
Keywords: wavefront sensing; laser; plane pattern; projected pupil ... See more keywords
Optimized pupil-plane phase masks for high-contrast imaging.
Sign Up to like & getrecommendations! Published in 2018 at "Applied optics"
DOI: 10.1364/ao.57.005688
Abstract: A differential evolution algorithm (DEA) is shown to improve the design of phase-only pupil plane masks for imaging in the presence of a high-intensity point source. Strehl and suppression ratio metrics for various phase basis… read more here.
Keywords: phase; phase masks; optimized pupil; pupil plane ... See more keywords