Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
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DOI: 10.1016/j.polymertesting.2020.106669
Abstract: Abstract In post-CMP (chemical mechanical polishing) processing, the use of poly vinyl acetal (PVA) brushes to clean the wafer surface is one of the most effective and prominent techniques applied for the removal of CMP… read more here.
Keywords: pva brushes; organic impurities; pencil type;